JPH0176038U - - Google Patents
Info
- Publication number
- JPH0176038U JPH0176038U JP1987172396U JP17239687U JPH0176038U JP H0176038 U JPH0176038 U JP H0176038U JP 1987172396 U JP1987172396 U JP 1987172396U JP 17239687 U JP17239687 U JP 17239687U JP H0176038 U JPH0176038 U JP H0176038U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- storage section
- wafer
- wafer storage
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- 230000001154 acute effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172396U JPH0176038U (en]) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172396U JPH0176038U (en]) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176038U true JPH0176038U (en]) | 1989-05-23 |
Family
ID=31464369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172396U Pending JPH0176038U (en]) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176038U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112013655A (zh) * | 2020-08-18 | 2020-12-01 | 涌明科技(上海)有限公司 | 一种半导体芯片烘烤装置 |
-
1987
- 1987-11-10 JP JP1987172396U patent/JPH0176038U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112013655A (zh) * | 2020-08-18 | 2020-12-01 | 涌明科技(上海)有限公司 | 一种半导体芯片烘烤装置 |